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The effect of cerium precursor agglomeration on the synthesis of ceria particles and its influence on shallow trench isolation chemical mechanical polishing performance

Cited 8 time in Web of Science Cited 8 time in Scopus
Authors
Kim, Dae-Hyeong; Kim, Sang-Kyun; Kang, Hyun-Goo; Park, Jea-Gun; Paik, Ungyu
Issue Date
2005-12
Citation
Japanese Journal of Applied Physics, Vol.44 No.12, pp.8422-8426
Keywords
cerium precursoragglomerationcalcinationceriaSTI CMP
Abstract
The level of agglomeration in the cerium precursor and its effect on the physicochemical properties of the synthesized ceria particles and how these properties influence shallow trench isolation chemical mechanical polishing (STI CMP) performance were investigated. Two different types of ceria particles were synthesized from cerium precursors of different degrees of agglomeration. The crystallinity and particle size distribution of the synthesized ceria particles were markedly different between these two types of particles. The ceria particles synthesized from agglomerated cerium precursors had a smaller crystallite size than the other particles due to the incomplete decarbonation reaction, which resulted in large agglomerations of particles. The different physical characteristics of the ceria particles resulted in remarkable discrepancies between the STI CMP performances of the ceria slurries, such as the oxide removal rate, the selectivity and the uniformity.
ISSN
0021-4922
URI
http://hdl.handle.net/10371/164295
DOI
https://doi.org/10.1143/JJAP.44.8422
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Chemical Convergence for Energy and Environment (에너지환경 화학융합기술전공)Journal Papers (저널논문_에너지환경 화학융합기술전공)
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