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Stretchable and foldable silicon integrated circuits

Cited 1095 time in Web of Science Cited 1144 time in Scopus
Authors
Kim, Dae-Hyeong; Ahn, Jong-Hyun; Choi, Won Mook; Kim, Hoon-Sik; Kim, Tae-Ho; Song, Jizhou; Huang, Yonggang Y.; Liu, Zhuangjian; Lu, Chun; Rogers, John A.
Issue Date
2008-04
Citation
Science, Vol.320 No.5875, pp.507-511
Abstract
We have developed a simple approach to high- performance, stretchable, and foldable integrated circuits. The systems integrate inorganic electronic materials, including aligned arrays of nanoribbons of single crystalline silicon, with ultrathin plastic and elastomeric substrates. The designs combine multilayer neutral mechanical plane layouts and "wavy" structural configurations in silicon complementary logic gates, ring oscillators, and differential amplifiers. We performed three- dimensional analytical and computational modeling of the mechanics and the electronic behaviors of these integrated circuits. Collectively, the results represent routes to devices, such as personal health monitors and other biomedical devices, that require extreme mechanical deformations during installation/ use and electronic properties approaching those of conventional systems built on brittle semiconductor wafers.
ISSN
0036-8075
URI
http://hdl.handle.net/10371/164342
DOI
https://doi.org/10.1126/science.1154367
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Chemical Convergence for Energy and Environment (에너지환경 화학융합기술전공)Journal Papers (저널논문_에너지환경 화학융합기술전공)
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