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ALD HfO₂게이트 유전막의 특성 향상에 대한 연구
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- Authors
- Advisor
- 황철성
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054151
https://hdl.handle.net/10371/16668
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