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Response Analysis of Resistor-type Gas Sensor with Bias Voltage Condition
Cited 4 time in
Web of Science
Cited 3 time in Scopus
- Authors
- Issue Date
- 2022-05
- Publisher
- IEEE
- Citation
- 2022 IEEE INTERNATIONAL SYMPOSIUM ON OLFACTION AND ELECTRONIC NOSE (ISOEN 2022)
- Abstract
- Many studies on the response analysis of resistor-type gas sensors have been reported. In this work, the bias dependent sensitivity of resistor-type gas sensors is investigated. The response to NO2 gas is 40% lower at high bias voltages than at low bias voltages. We analyze the effect of sensing material resistance and metal-semiconductor (sensing material) contact resistance on gas response. The measured results from the pattern to which the transmission line method was applied show that the bias-dependent response is observed only in the contact resistance component. This result is analyzed using the bias dependence of the Schottky barrier that occurs in the metal-semiconductor contact. The performance of the sensor can be improved by utilizing the bias dependent sensitivity characteristics.
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