Micro Electrode Arrays Fabrication Using Flexible Perfluoroalkoxy Alkane Films

Abstract

Perfluoroalkoxy alkane (PFA) film-based microelectrode arrays were fabricated in monolithic structure with pretreatment of plasma on the surface followed by patterning gold electrode array without additional adhesion metal layer. The encapsulation of patterned fluoropolymer layer was thermally laminated at the temperature of under its melting point, interleaved between Polytetrafluoroethylene (PTFE) sheets which indicate formation of micro-corrugated pattern. The fabricated device was optically opaque, however, transparent in solution due to the diffraction of light. Packaged substrate was easily processable with focused ion beam laser machine in high resolution. According to excellent reliability, PFA based micro gold electrode can be applied in a variety of biomedical application such as artificial retina, neural sensors with chronic implantation.