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Influence of Etch Profiles on the Leakage Current and Capacitance of 3-D DRAM Storage Capacitors
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, Seongun | - |
dc.contributor.author | Yoon, Gyuhan | - |
dc.contributor.author | Choi, Woo Young | - |
dc.date.accessioned | 2022-10-26T07:21:10Z | - |
dc.date.available | 2022-10-26T07:21:10Z | - |
dc.date.created | 2022-10-20 | - |
dc.date.issued | 2019-04 | - |
dc.identifier.citation | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, Vol.19 No.2, pp.208-213 | - |
dc.identifier.issn | 1598-1657 | - |
dc.identifier.uri | https://hdl.handle.net/10371/186757 | - |
dc.description.abstract | The influence of etch profiles on leakage current and capacitance of three-dimensional (3-D) dynamic random access memory (DRAM) storage capacitors is investigated by using full 3-D technology computer-aided design (TCAD) simulation. According to the simulation results calibrated by experimental data, as the ratio of bottom critical dimension (CDBOT) to top critical dimension (CDTOP) of a DRAM storage capacitor decreases, storage capacitance (C-s) decreases while leakage current (I-leak) increases. Thus, it is important to achieve steep etch profiles during the fabrication of DRAM storage capacitors for higher DRAM capacity and longer refresh time. | - |
dc.language | 영어 | - |
dc.publisher | 대한전자공학회 | - |
dc.title | Influence of Etch Profiles on the Leakage Current and Capacitance of 3-D DRAM Storage Capacitors | - |
dc.type | Article | - |
dc.identifier.doi | 10.5573/JSTS.2019.19.2.208 | - |
dc.citation.journaltitle | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE | - |
dc.identifier.wosid | 000465573000011 | - |
dc.identifier.scopusid | 2-s2.0-85067062758 | - |
dc.citation.endpage | 213 | - |
dc.citation.number | 2 | - |
dc.citation.startpage | 208 | - |
dc.citation.volume | 19 | - |
dc.identifier.kciid | ART002459022 | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Choi, Woo Young | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
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