Publications
Detailed Information
Monolithic Three-Dimensional 65-nm CMOS-Nanoelectromechanical Reconfigurable Logic for Sub-1.2-V Operation
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwon, Hyug Su | - |
dc.contributor.author | Kim, Seung Kyu | - |
dc.contributor.author | Choi, Woo Young | - |
dc.date.accessioned | 2022-10-26T07:21:19Z | - |
dc.date.available | 2022-10-26T07:21:19Z | - |
dc.date.created | 2022-10-20 | - |
dc.date.issued | 2017-09 | - |
dc.identifier.citation | IEEE Electron Device Letters, Vol.38 No.9, pp.1317-1320 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | https://hdl.handle.net/10371/186770 | - |
dc.description.abstract | Monolithic three-dimensional (M3D) CMOS-nanoelectromechanical (CMOS-NEM) reconfigurable logic (RL) circuits are experimentally demonstrated. This is the first experimental demonstration of 65-nm M3D CMOS-NEM RL circuits satisfying the 1.2-V supply voltage (VDD) requirement of the 65-nm technology node. The fabrication process is identical to the conventional 65-nm CMOS baseline process, in which copper NEM memory switches are formed by a dual damascene process. | - |
dc.language | 영어 | - |
dc.publisher | Institute of Electrical and Electronics Engineers | - |
dc.title | Monolithic Three-Dimensional 65-nm CMOS-Nanoelectromechanical Reconfigurable Logic for Sub-1.2-V Operation | - |
dc.type | Article | - |
dc.identifier.doi | 10.1109/LED.2017.2726685 | - |
dc.citation.journaltitle | IEEE Electron Device Letters | - |
dc.identifier.wosid | 000408355200033 | - |
dc.identifier.scopusid | 2-s2.0-85028947899 | - |
dc.citation.endpage | 1320 | - |
dc.citation.number | 9 | - |
dc.citation.startpage | 1317 | - |
dc.citation.volume | 38 | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Choi, Woo Young | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.