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SELF-ASSEMBLED NANOCHAMBER ARRAYS FOR in-situ TEM OBSERVATION OF LIQUID-PHASE SAMPLES

Cited 2 time in Web of Science Cited 2 time in Scopus
Authors

Lim, Kitaek; Bae, Yuna; Kim, Kihwan; Jeon, Sungho; Kim, Byung Hyo; Park, Jungwon; Lee, Won Chul

Issue Date
2019-01
Publisher
IEEE
Citation
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), pp.105-106
Abstract
This work presents a highly-ordered array of nanoscale chambers, capable of encapsulating liquid samples for TEM (transmission electron microscopy) imaging. The present nanochambers arc formed with two layers of free-standing graphene and self-assembled nanopores in an A AO (anodic aluminum oxide) membrane, which improve a transparency for electron beam and uniformities in chamber sizes/distributions. respectively. We envision that the present work will enable us to efficiently observe nanoscale processes in liquid with high-resolution TEM.
ISSN
1084-6999
URI
https://hdl.handle.net/10371/187026
DOI
https://doi.org/10.1109/MEMSYS.2019.8870760
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