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A V-band micromachined 2-D beam-steering antenna driven by magnetic force with polymer-based hinges

Cited 44 time in Web of Science Cited 54 time in Scopus

Baek, CW; Song, SH; Park, JH; Lee, S; Kim, JM; Choi, W; Cheon, C; Kim, YK; Kwon, Y

Issue Date
Institute of Electrical and Electronics Engineers
IEEE Transactions on Microwave Theory and Techniques, Vol.51 No.1, pp.325-331
This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40degrees. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern. at the V-band.
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  • College of Engineering
  • Department of Electrical and Computer Engineering
Research Area High Frequency Microelectronics, Microwave engineering, Radio Frequency Integrated Circuit, 초고주파 공학, 초고주파 시스템, 초고주파 집적회로


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