All-Solution-Processed High-Performance MoS<sub>2</sub> Thin-Film Transistors with a Quasi-2D Perovskite Oxide Dielectric

Abstract

Assembling solution-processed van der Waals (vdW) materials into thin films holds great promise for constructing large-scale, high-performance thin-film electronics, especially at low temperatures. While transition metal dichalcogenide thin films assembled in solution have shown potential as channel materials, fully solution-processed vdW electronics have not been achieved due to the absence of suitable dielectric materials and high-temperature processing. In this work, we report on all-solution-processedvdW thin-film transistors (TFTs) comprising molybdenum disulfides (MoS2) as the channel and Dion-Jacobson-phase perovskite oxides as the high-permittivity dielectric. The constituent layers are prepared as colloidal solutions through electrochemical exfoliation of bulk crystals, followed by sequential assembly into a semiconductor/dielectric heterostructure for TFT construction. Notably, all fabrication processes are carried out at temperatures below 250 degrees C. The fabricated MoS2 TFTs exhibit excellent device characteristics, including high mobility (>10 cm(2) V-1 s(-1)) and an on/off ratio exceeding 10(6). Additionally, the use of a high-k dielectric allows for operation at low voltage (similar to 5 V) and leakage current (similar to 10(-11) A), enabling low power consumption. Our demonstration of the low-temperature fabrication of high-performance TFTs presents a cost-effective and scalable approach for heterointegrated thin-film electronics.