Manufacturing of LiNi0.5Mn1.5O4/LiPON/SiNx structured flexible lithium microbatteries

Abstract

We present a fabricating method for all-solid-state LiNi0.5Mn1.5O4/LiPON/SiNx structure flexible lithium microbatteries using excimer laser annealing system. Excimer laser annealing can selectively crystallize LiNi0.5Mn1.5O4 cathode thin film in low temperature without thermal damage of substrate. Structural properties of the thin films were investigated by X-ray diffraction (XRD), transmission electron microscope (TEM), and scanning electron microscopy (SEM). The initial capacity of flexible battery on polyimide substrate was 20 mu Ah mu m(-1) cm(-2) at 0.2 C-rate with operating voltage of 4.6 V. Therefore, we expect that these batteries make it possible to be applied as a power source for various types of micro-sensors.