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A study on the deposition behavior of amorphous silicon and silicon-germanium thin film for the formation of quantum dot of single electron : 단일 전자 소자용 양자점 형성을 위한 비정질 실리콘과 실리콘-게르마늄 박막의 증착 거동에 대한 연구
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- Authors
- Advisor
- 김기범
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :금속공학과,2000.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000070089
https://hdl.handle.net/10371/30634
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