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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Materials Science and Engineering (재료공학부)
Theses (Master's Degree_재료공학부)
Ta(OC[2]H[5])[5] 와 NH3를 사용하여 증착한 CVD-TaON의 증착 기구와 전기적 성질에 대한 연구
- Authors
- Advisor
- 김기범
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :금속공학과,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068301
https://hdl.handle.net/10371/30665
- Files in This Item: There are no files associated with this item.
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