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AFM의 원리를 이용한 박막 두께 측정 장비 연구 및 제작
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- Authors
- Advisor
- 박병국
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- AFM(Atomic Force Microscopy) ; 박막 두께 측정 ; 실리콘 산화막 ; Feedback ; PZT ; 극소 단차 ; thickness of thin films ; Ultra-thin SiO₂film ; Ultra-small step height
- Description
- 학위논문(석사)--서울대학교 대학원 :전기.컴퓨터공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065405
https://hdl.handle.net/10371/31013
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