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광 리소그래피에서의 분해능과 초점심도 한계의 확장에 관한 연구와 물리교육에의 응용 : Study on extending the limits of resolution and depth of focus in optical lithography and its application to the physics education)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이성묵 | - |
| dc.contributor.author | 박정보 | - |
| dc.date.accessioned | 2010-01-16T12:41:01Z | - |
| dc.date.available | 2010-01-16T12:41:01Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060744 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/34168 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :과학교육과 물리전공,2002. | ko |
| dc.format.extent | xi, 147 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 광 리소그래피 | ko |
| dc.subject | optical lithography | ko |
| dc.subject | 초점심도 | ko |
| dc.subject | resolution | ko |
| dc.subject | 벡터 회절 | ko |
| dc.subject | depth of focus | ko |
| dc.subject | 타원 편광 조명 | ko |
| dc.subject | vector diffraction | ko |
| dc.subject | E-D Tree | ko |
| dc.subject | optical proximity correction(OPC) | ko |
| dc.title | 광 리소그래피에서의 분해능과 초점심도 한계의 확장에 관한 연구와 물리교육에의 응용 | ko |
| dc.title.alternative | Study on extending the limits of resolution and depth of focus in optical lithography and its application to the physics education) | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 과학교육과 물리전공 | - |
| dc.description.degree | Doctor | ko |
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