A Study on the development of new crystallization method and characterization of ferroelectric thin fillms for high-performance non-volatile memory devices : selectively nucleated lateral crystallization(SNLC)

이장식

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S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)

A Study on the development of new crystallization method and characterization of ferroelectric thin fillms for high-performance non-volatile memory devices : selectively nucleated lateral crystallization(SNLC)
고성능 비휘발성 메모리 소자를 위한 강유전체 박막의 새로운 결정화 방법 및 특성 평가에 관한 연구 : 선택적 핵생성에 의한 측면 결정화(SNLC)

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Authors: 이장식

Advisor: 주승기

Issue Date: 2002

Publisher: 서울대학교 대학원

Keywords: ferroelectric thin fillm; 강유전체 박막; PZT; 결정립계; grain-boundary; 단결정립; single-grain; 선택적 핵생성; grain growth; 결정립 성장

Description: Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002.

Language: English

URI: http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060920

http://hdl.handle.net/10371/35423

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Appears in Collections:: College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)

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