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Material characterizations and microfailure properties of thin film structure through design and fabrication of electrostatically actuated test device : 미세평가소자 설계제작을 통한 마이크로시스템 응용 박막구조물의 미소물성 및 파손특성 평가
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- Authors
- Advisor
- 권동일
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS raliability ; 파손사이클 ; design of the test device ; 노치효과 ; semiconductor and micromachining process ; 파손가속인자 ; Al and Si film ; 파손수명 ; notch effect ; 항복강도
- Description
- Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060864
https://hdl.handle.net/10371/35429
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