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ZnO 압전박막을 이용한 박막형 공진기소자의 제조 : Fabrication of film bulk acoustic resonator devices using piezoelectric ZnO films
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- Authors
- Advisor
- 김형준
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066364
https://hdl.handle.net/10371/35504
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