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유도결합 플라즈마 스퍼터링법을 이용한 Ti계 질화물의 제조 및 특성에 관한 연구
Preparation and properties of Ti-based compounds made by inductively coupled plasma assisted sputtering deposition

DC Field Value Language
dc.contributor.advisor이정중-
dc.contributor.author박흥식-
dc.date.accessioned2010-01-17T02:34:31Z-
dc.date.available2010-01-17T02:34:31Z-
dc.date.copyright2001.-
dc.date.issued2001-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066363kor
dc.identifier.urihttps://hdl.handle.net/10371/35505-
dc.description학위논문(박사)--서울대학교 대학원 :재료공학부,2001.ko
dc.format.extentix, 141 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectInductibely coupled plasma assisted sputteringko
dc.subject유도결합 플라즈마 스퍼터링ko
dc.subjectTiN coatingko
dc.subject고경도ko
dc.subjectmechanical and wear propertiesko
dc.subject내마모성ko
dc.subjectplasma densityko
dc.subject플라즈마 밀도ko
dc.subjectTiN 박막ko
dc.title유도결합 플라즈마 스퍼터링법을 이용한 Ti계 질화물의 제조 및 특성에 관한 연구ko
dc.title.alternativePreparation and properties of Ti-based compounds made by inductively coupled plasma assisted sputtering depositionko
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctorko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
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