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유도결합 플라즈마 스퍼터링법을 이용한 Ti계 질화물의 제조 및 특성에 관한 연구 : Preparation and properties of Ti-based compounds made by inductively coupled plasma assisted sputtering deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 박흥식 | - |
| dc.date.accessioned | 2010-01-17T02:34:31Z | - |
| dc.date.available | 2010-01-17T02:34:31Z | - |
| dc.date.copyright | 2001. | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066363 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/35505 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :재료공학부,2001. | ko |
| dc.format.extent | ix, 141 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | Inductibely coupled plasma assisted sputtering | ko |
| dc.subject | 유도결합 플라즈마 스퍼터링 | ko |
| dc.subject | TiN coating | ko |
| dc.subject | 고경도 | ko |
| dc.subject | mechanical and wear properties | ko |
| dc.subject | 내마모성 | ko |
| dc.subject | plasma density | ko |
| dc.subject | 플라즈마 밀도 | ko |
| dc.subject | TiN 박막 | ko |
| dc.title | 유도결합 플라즈마 스퍼터링법을 이용한 Ti계 질화물의 제조 및 특성에 관한 연구 | ko |
| dc.title.alternative | Preparation and properties of Ti-based compounds made by inductively coupled plasma assisted sputtering deposition | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | ko |
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