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유도결합 플라즈마 스퍼터링법을 이용한 Ti계 질화물의 제조 및 특성에 관한 연구 : Preparation and properties of Ti-based compounds made by inductively coupled plasma assisted sputtering deposition
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- Authors
- Advisor
- 이정중
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- Inductibely coupled plasma assisted sputtering ; 유도결합 플라즈마 스퍼터링 ; TiN coating ; 고경도 ; mechanical and wear properties ; 내마모성 ; plasma density ; 플라즈마 밀도 ; TiN 박막
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066363
https://hdl.handle.net/10371/35505
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