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Sidewall 구조를 이용한 미세 선폭 구현과 nMOSFET에의 적용

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Authors

성석강

Advisor
박병국
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :전기공학부,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072455

https://hdl.handle.net/10371/36642
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