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As[2]?5 keV 이온 주입을 이용한 얕은 접합의 0.1 ㎛ NMOSFET

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Authors

최병용

Advisor
박병국
Issue Date
2000
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :전기공학부,2000.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068711

https://hdl.handle.net/10371/38218
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