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나노 임프린트 리소그래피 공정의 해석적 모델링 및 점탄성 유한요소해석 : Analytical modeling and viscoelastic finite element analysis of nanoimprint lithography process
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- Authors
- Advisor
- 신효철
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 나노임프린트 리소그래피 ; Nanoimprint Lithography ; 스퀴즈 유동 ; Squeeze Flow ; 점탄성 ; Viscoelastic behavior ; 유한요소법 ; Finite Element Method ; 응력완화 ; Stress Relaxation ; 유리천이온도 ; Glass Transition Temperature
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2008.8.
- Language
- Korean
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