Publications
Detailed Information
Nanoporous organosilicate thin films for low dielectric
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 차국헌
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 유기실리케이트 ; Organosilicate ; 저유전물질 ; Low-k ; 유기/무기 혼성 ; Organic/inorganic hybrid ; 나노기공 ; Nanoporous thin film ; 상용성 ; Miscibility ; 기공 붕괴 ; Pore collapse ; 유연성 ; Flexibility ; 친수성 ; Hydrophilicity
- Description
- Thesis (master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054506
https://hdl.handle.net/10371/43563
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.