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Design and Characterization of a Microwave Plasma Source using a Rectangular Resonant Cavity
사각 공진 공동을 이용한 마이크로파 플라즈마 원의 설계 및 특성연구

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Authors
김현태
Advisor
황용석
Issue Date
2009
Publisher
서울대학교 대학원
Keywords
마이크로파 플라즈마microwave plasma공명resonant cavity공진resonance공동cavity length공진파괴공동길이
Description
학위논문(석사) --서울대학교 대학원 :에너지시스템공학부, 2009.2.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037192

https://hdl.handle.net/10371/43602
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Energy Systems Engineering (에너지시스템공학부)Theses (Master's Degree_에너지시스템공학부)
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