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나노 임프린트 공정에서의 polymer 유동 해석
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- Authors
- Advisor
- 이우일
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 나노 임프린트 리소그래피(NIL) ; nano-imprinting lithography ; 압력 효과 ; pressure effect ; 스탬프 구조물의 형상 ; geometry of stamp patterns ; PMMA ; PMMA ; 핫엠포싱(hot-embossing) ; hot-embossing ; polymer 유동 ; polymer flow
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047538
https://hdl.handle.net/10371/44466
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