Publications
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Residual stress gradient relaxation and property modification of sputtered gold films by ion implantation
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- Authors
- Advisor
- 김용협
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 미세전자기기시스템 ; MEMS ; 응력 구배 ; stress gradient ; 스퍼터링 금 박막 ; sputtered gold films ; 이온주입 ; ion implantation ; 표면미세가공 ; surface micromachining ; 계단형 지지대 ; step-ip anchor ; 플라즈마 애싱 ; plasma ashing ; 극미세압입기 ; nano-indentation
- Description
- Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052806
https://hdl.handle.net/10371/44512
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