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감도 향상을 위한 실리콘 나노 와이어를 이용한 압저항 압력 센서에 관한 연구 : (A) Study for enhancing sensitivity of piezoresistive pressure sensor using silicon nanowire
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- Authors
- Advisor
- 전국진
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 압저항 압력 센서 ; piezoresistive pressure sensor ; 나노와이어 ; nanowire ; 감도 ; sensitivity ; 측정범위 ; dynamic range ; 습식 식각 ; wet etch ; 다이아프래임 ; diaphragm ; low cost
- Description
- 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2009.8.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038729
https://hdl.handle.net/10371/44690
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