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Modification of aluminum thin films for MEMS by ion implantation
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- Authors
- Advisor
- 김용협
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS (미소전기기계시스템) ; MEMS (Micro-electro-mechanical systems) ; 알루미늄 ; aluminum ; 이온 주입 ; ion implantation ; 헬륨 ; helium ; 질소 ; nitrogen ; 힐락 ; hillock ; 표면 거칠기 ; surface roughness ; 경도 ; hardness ; 탄성계수 ; elastic modulus ; 응력구배 ; stress gradient
- Description
- Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055744
https://hdl.handle.net/10371/44808
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