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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Mechanical Aerospace Engineering (기계항공공학부)
Theses (Master's Degree_기계항공공학부)
Modification of aluminum thin films for MEMS by ion implantation
- Authors
- 김정길
- Advisor
- 김용협
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS (미소전기기계시스템); MEMS (Micro-electro-mechanical systems); 알루미늄; aluminum; 이온 주입; ion implantation; 헬륨; helium; 질소; nitrogen; 힐락; hillock; 표면 거칠기; surface roughness; 경도; hardness; 탄성계수; elastic modulus; 응력구배; stress gradient
- Description
- Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055744
https://hdl.handle.net/10371/44808
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