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Detailed Information
Development of soft imprint lithography and its application to nanoparticle patterning
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- Authors
- Advisor
- 최만수
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 나노입자 ; Nanoparticle ; 나노패터닝 ; Nanopatterning ; 임프린트 리소그래피 ; Imprint lithography ; 소프트리소그래피 ; Softlithography ; 나노 구조물 ; Nanofabrication ; 입자 포집 ; Particle deposition ; 비등방성 식각 ; Reactive ion etching ; 증발 응축법 ; Evaporation and condensation method
- Description
- Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055275
https://hdl.handle.net/10371/44823
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