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Development of an efficient radiative transfer model for specular surfaces and its application to optimization of rapid thermal processing : 정반사면에서의 복사전달 해석 모델개발과 급속 열공정 최적화에의 응용
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- Authors
- Advisor
- 이준식
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 급속열공정 ; Rapid thermal processing (rtp) ; 웨이퍼 ; Wafer ; 복사열전달 ; Radiative heat transfer ; 확산면 ; Diffuse ; 정반사면 ; Specular ; 경유반사법 ; Transition reflection method ; 최적화 ; Optimization ; 선형계수법 ; Uniformity ; Linear programming
- Description
- Thesis (doctoral)--서울대학교 대학원 :기계공학과,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058587
https://hdl.handle.net/10371/44868
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