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Real-time end-point and fault detection of plasma etching processes : 플라즈마 식각 공정에 대한 실시간 종말점 및 이상진단
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- Authors
- Advisor
- 윤인섭
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 다변량 통계적 모델링 ; Multivariate statistical modeling ; (변형된, 다중) 주요인자 분석방법 ; (Modified, Multi-way) Principal component analysis ; 이상감지 ; Fault detection ; 플라즈마 식각 ; Plasma etching ; 종말점 검출 ; End-point detection ; 광학 방출 스펙트럼 ; Optical emission spectroscopy
- Description
- Thesis(doctors) --서울대학교 대학원 :응용화학부, 2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041580
https://hdl.handle.net/10371/45279
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