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Design and analysis of out-of-plane and in-plane differential resonant silicon accelerometers for navigational applications : 항법급 수직형, 수평형 차동공진형가속도계의 설계 및 해석
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- Authors
- Advisor
- 전국진
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 멤스 ; MEMS ; 가속도계 ; accelerometer ; 공진형 ; resonant ; 항법급 ; inertial-grade ; 차동형 ; differential ; 수직형 ; out-of-plane ; 수평형 ; in-plane ; 진공실장 ; vacuum packaging ; 웨이퍼 단위 ; wafer-level ; 선택도 ; quality factor ; 마이크로머시닝 ; micromachining
- Description
- Thesis(doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056187
https://hdl.handle.net/10371/45458
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