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Stress gradient relaxation and property modification of polysilicon films by ion implantation
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- Authors
- Advisor
- 김용협
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS ; Mems ; 이온 주입 ; Ion implantation ; 응력 구배 ; Stress gradient ; 다결정 실리콘 ; Polysilicon ; 표면 미세 가공 ; Surface micromachining ; 비결정질 실리콘 ; Amorphous silicon ; nano-indentation ; Nano-indentation ; 탄성계수 ; Elastic modulus ; 경도 ; Hardness ; 표면 거칠기 ; Roughness
- Description
- Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059897
https://hdl.handle.net/10371/45649
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