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DRIE 공정에서의 Scallop 현상과 Eutectic 기판 접합을 이용한 MEMS 가속도계

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Authors
전윤광
Advisor
김용협
Issue Date
2003
Publisher
서울대학교 대학원
Keywords
몸체미세가공기술MEMS차분정전용량형DRIE정전력 구동기Differential capacitive가속도계Accelerometer
Description
학위논문(석사)--서울대학교 대학원 :기계항공공학부,2003.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057400

https://hdl.handle.net/10371/45743
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Master's Degree_기계항공공학부)
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