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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Electrical and Computer Engineering (전기·정보공학부)
Theses (Ph.D. / Sc.D._전기·정보공학부)
Design and fabrication of 30nm self-aligned FinFET
30nm 자기 정렬형 FinFET 설계 및 제작
- Authors
- 우동수
- Advisor
- 박병국
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- self-aligned FinFET; 이중 게이트 MOSFET; wide source/drain; 넓은 소소/드레인; non-uniform doping; 불균일 도핑; short channel effect; 단채널효과
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055116
http://hdl.handle.net/10371/45823
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