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超高眞空 電子回轉共鳴 플라즈마 化學氣狀蒸着 裝置 製作 및 실리콘 기판 洗淨과 炭化에의 응용 : Fabrication of ultra high vacuum electron cycloton resonance plasma chemical vapor deposition system and its application to the cleaning and carbonization of Si wafer
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- Authors
- Advisor
- 황기웅
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2003.
- Language
- Korean
- URI
- http://library.snu.ac.kr/search/DetailView.ax?sid=1&cid=0001113355
https://hdl.handle.net/10371/45856
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