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Spectral reflectometry를 이용한 다층 박막의 두께 측정에 관한 연구 : Study on thickness measurement of multilayer thin film with spectral reflctometry
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- Authors
- Advisor
- 박희재
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 두께 ; Thickness ; 다층 박막 ; Multilayer Thin film ; 분광 반사계 ; Spectral Reflectometry ; 반사율 ; Reflectance ; 표면 거칠기 ; Surface roughness Peak detection. ; Peak Detection
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045750
https://hdl.handle.net/10371/48171
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