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Nanocrystalline silicon thin film transistors fabricated employing inductively coupled plasma chemical vapor deposition system : 誘導 結合 플라즈마 化學 氣象 蒸着 시스템을 利用하여 製作한 微細結晶 실리콘 薄膜 트랜지스터에 關한 硏究
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- Authors
- Advisor
- 한민구
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 미세 결정 실리콘 박막 트랜지스터 (nc-Si TFT) ; nanocrystalline silicon thin film transistor (nc-Si TFT) ; 미세 결정 실리콘 박막 (nc-Si thin film) ; nanocrystalline silicon film ; 유도 결합 플라즈마 화학 기상 증착 시스템 (ICP-CVD) ; inductively coupled plasma chemical vapor deposition (ICP-CVD)
- Description
- Thesis(doctors) --서울대학교 대학원 :전기. 컴퓨터공학부, 2008.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039579
https://hdl.handle.net/10371/48459
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