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(A)Laterally robust MEMS probe card for fine pitch test using a new cantilever moving scheme
새로운 외팔보 동작 형태를 이용한 미세피치 측정을 위한 강건한 초소형 프로브 카드

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Authors
김봉환
Advisor
전국진
Issue Date
2005
Publisher
서울대학교 대학원
Keywords
멤즈 프로브 카드MEMS probe card접촉저항contact resistance접촉힘contact force누설전류wear평탄도
Description
Thesis(doctoral)--서울대학교 대학원 :전기컴퓨터공학부,2005.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050113

https://hdl.handle.net/10371/48900
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Ph.D. / Sc.D._전기·정보공학부)
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