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(A)Laterally robust MEMS probe card for fine pitch test using a new cantilever moving scheme : 새로운 외팔보 동작 형태를 이용한 미세피치 측정을 위한 강건한 초소형 프로브 카드
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- Authors
- Advisor
- 전국진
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 멤즈 프로브 카드 ; MEMS probe card ; 접촉저항 ; contact resistance ; 접촉힘 ; contact force ; 누설전류 ; wear ; 평탄도
- Description
- Thesis(doctoral)--서울대학교 대학원 :전기컴퓨터공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050113
https://hdl.handle.net/10371/48900
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