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광 리소그래피에서 타원 편광 조명법에 의한 상의 계산과 결상 교수법 연구 : Calculations on image for the elliptical polarization in photolithography and study for the instruction of imaging
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이성묵 | - |
| dc.contributor.author | 전성호 | - |
| dc.date.accessioned | 2010-02-05T03:53:50Z | - |
| dc.date.available | 2010-02-05T03:53:50Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081722 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50329 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :과학교육과 물리전공,1996. | ko |
| dc.format.extent | vii, 137 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 광리소그래피 | ko |
| dc.subject | photolithography | ko |
| dc.subject | 결상이론 | ko |
| dc.subject | partial coherence theory | ko |
| dc.subject | 위상변위마스크 | ko |
| dc.subject | PSM | ko |
| dc.subject | 변형조명 | ko |
| dc.subject | OAI | ko |
| dc.subject | 선편광조명 | ko |
| dc.subject | vector diffraction theory | ko |
| dc.title | 광 리소그래피에서 타원 편광 조명법에 의한 상의 계산과 결상 교수법 연구 | ko |
| dc.title.alternative | Calculations on image for the elliptical polarization in photolithography and study for the instruction of imaging | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 과학교육과 물리전공 | - |
| dc.description.degree | Doctor | ko |
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