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유기실리콘 화합물원료를 이용한 단결정 탄화규소 박막성장 및 특성 연구 : Growth and characterization of heteroepitaxial β-SiC thin films using organosilicon precursor
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- Authors
- Advisor
- 김형준
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- Silicon carbide(SiC) ; 탄화규소 ; thin film ; 박막 ; single crystalline ; 단결정 ; buffer layer ; 버퍼층 ; chemical vapor deposition(CVD) ; 화학기상증착법
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079075
https://hdl.handle.net/10371/50788
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