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고주파 마그네트론 스퍼터링법에 의한 ZnO 박막의 증착 및 표면탄성파 필터의 응용
Deposition of ZnO thin films by rf magnetron sputtering and its application to SAW filters

DC Field Value Language
dc.contributor.advisor김형준-
dc.contributor.author이용의-
dc.date.accessioned2010-02-05T06:40:26Z-
dc.date.available2010-02-05T06:40:26Z-
dc.date.copyright1996.-
dc.date.issued1996-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082722kog
dc.identifier.urihttps://hdl.handle.net/10371/50796-
dc.description학위논문(박사)--서울대학교 대학원 :무기재료공학과,1996.ko
dc.format.extentxvi, 299 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject고주파 마그네트론 스퍼터링ko
dc.subjectZnOko
dc.subject높은 에너지 입자 충돌ko
dc.subjectrf magnetron sputteringko
dc.subject우선배향성ko
dc.subjecthighly energntic species bombardmentko
dc.subject입사각ko
dc.subjectpreferred orientationko
dc.subject표면탄성파 필터ko
dc.subjectincident angleko
dc.title고주파 마그네트론 스퍼터링법에 의한 ZnO 박막의 증착 및 표면탄성파 필터의 응용ko
dc.title.alternativeDeposition of ZnO thin films by rf magnetron sputtering and its application to SAW filtersko
dc.typeThesis-
dc.contributor.department무기재료공학과-
dc.description.degreeDoctorko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
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