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고주파 마그네트론 스퍼터링법에 의한 ZnO 박막의 증착 및 표면탄성파 필터의 응용 : Deposition of ZnO thin films by rf magnetron sputtering and its application to SAW filters
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김형준 | - |
| dc.contributor.author | 이용의 | - |
| dc.date.accessioned | 2010-02-05T06:40:26Z | - |
| dc.date.available | 2010-02-05T06:40:26Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082722 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50796 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1996. | ko |
| dc.format.extent | xvi, 299 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 고주파 마그네트론 스퍼터링 | ko |
| dc.subject | ZnO | ko |
| dc.subject | 높은 에너지 입자 충돌 | ko |
| dc.subject | rf magnetron sputtering | ko |
| dc.subject | 우선배향성 | ko |
| dc.subject | highly energntic species bombardment | ko |
| dc.subject | 입사각 | ko |
| dc.subject | preferred orientation | ko |
| dc.subject | 표면탄성파 필터 | ko |
| dc.subject | incident angle | ko |
| dc.title | 고주파 마그네트론 스퍼터링법에 의한 ZnO 박막의 증착 및 표면탄성파 필터의 응용 | ko |
| dc.title.alternative | Deposition of ZnO thin films by rf magnetron sputtering and its application to SAW filters | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 무기재료공학과 | - |
| dc.description.degree | Doctor | ko |
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