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Effects of dry etching on the magnetic properties of permalloy (Ni81Fe19) thin films : 건식에칭이 퍼말로이 (Ni81Fe19) 박막의 자기적 특성에 미치는 영향
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- Authors
- Advisor
- 이정중
- Issue Date
- 1998
- Publisher
- 서울대학교 대학원
- Keywords
- 퍼말로이 박막 ; permalloy thin films ; 이온빔 에칭 ; ion beam etching ; 반응성 이온 에칭 ; reactive ion stching ; 에칭 손상 ; etching damage ; 표면 거칠기 ; surface roughness
- Description
- Thesis (doctoral)--서울대학교 대학원 :금속공학과,1998.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076342
https://hdl.handle.net/10371/50838
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