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알루미늄 박막의 금속 유기 화합물 화학증착법에 의한 평탄화 금속 배선 개발에 관한 연구 : A Study on the development of planarized metalization by metalorganic chemical vapor deposition of aluminum thin films
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- Authors
- Advisor
- 주승기
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079017
https://hdl.handle.net/10371/50859
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