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CVD 다이아몬드 성장의 기체 및 표면 반응속도에 관한 연구 : Gas phase and surface reaction kinetics of CVD diamond growth

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Authors

박순

Advisor
강탁
Issue Date
1996
Publisher
서울대학교 대학원
Keywords
다이아몬드HFCVD화학증착법반응속도론수치모사
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1996.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081620

https://hdl.handle.net/10371/50869
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