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동시 스퍼터링법에 의한 강유전체 기억소자용 PZT와 BST 박막 제조 및 특성 향상에 관한 연구 : A Study on the fabrication and improvement of PZT and BST thin films for the ferroelectric memory devices by co-sputtering method
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- Authors
- Advisor
- 주승기
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Keywords
- 동시 스퍼터링 ; PZT ; 강유전체 ; BST ; 기억소자 ; co-sputtering ; 상변태 ; ferroelectric ; 전도기구 ; memory device
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1996.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081555
https://hdl.handle.net/10371/50872
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