Browse

플라즈마 화학증착법을 이용한 (Ti[1-x]Al[x])N 박막의 제조 및 특성에 관한 연구
Preparation and properties of the (Ti[1-x]Al[x])N coatings deposited by plasma enhanced chemical vapor deposition

Cited 0 time in Web of Science Cited 0 time in Scopus
Authors
이상협
Advisor
이정중
Issue Date
1995
Publisher
서울대학교 대학원
Keywords
플라즈마 화학증착TiAlNAlN농도경사준안정상
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1995.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000084671

https://hdl.handle.net/10371/50889
Files in This Item:
There are no files associated with this item.
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse