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플라즈마 화학증착법을 이용한 (Ti[1-x]Al[x])N 박막의 제조 및 특성에 관한 연구 : Preparation and properties of the (Ti[1-x]Al[x])N coatings deposited by plasma enhanced chemical vapor deposition
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- Authors
- Advisor
- 이정중
- Issue Date
- 1995
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1995.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000084671
https://hdl.handle.net/10371/50889
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