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The deposition characteristics of TaCN films deposited by MOCVD (metallorganic chemical vapor deposition) : 유기금속화학증착 법으로 증착한 TaCN 박막의 증착특성
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- Authors
- Advisor
- 김기범
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :금속공학과 재료공학전공,1996.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082012
https://hdl.handle.net/10371/52244
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