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화학증착법에 의한 초고집적 소자 배선용 알루미늄 박막 형성에 있어서 플라즈마 효과

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Authors
김동찬
Advisor
주승기
Issue Date
1996
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과 재료공학전공,1996.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000080838

https://hdl.handle.net/10371/52254
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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